| Model |
SEM18 |
SEM20 |
| Resolution |
6nm（18kV,SE Image） |
5nm(20kV,SE Image) |
| Equipment environment |
200V,50Hz,1KW,No shock-absorbing table required |
| Accelerating Voltage |
3kV~18kV |
3kV~20kV |
| Electron gun |
Pre Centered tungsten filament Cartridge |
Pre Centered tungsten filament Cartridge/Lanthanum Hexaboride Filament |
| Magnification |
150,000X |
200,000X |
| Detector type |
BSE Detector, SE Detector(optional),EDS Detector.EDS is optional, for component analysis |
| Stroke of sample stage |
30mm×30mm |
50mm×50mm |
| Max Sample size |
50mm in diameter, 35mm in height |
70mm in diameter, 30mm in height |
| Vacuum system |
High vacuum |
High vacuum & Low vacuum |
| Imaging modes |
Video Mode: 512 x 512 pixels, no small window scanning; |
| Fast Scan Mode: Scanning time less than 3 seconds, 512 x 512 pixels; |
| Slow Scan Mode: Scanning time less than 40 seconds, 2048 x 2048 pixels; |
| Image Format: BMP, TIFF, JPEG, PNG; |
| Navigation Functions |
Optical image navigation |
Optical image navigation, in-cabin camera |
| Auto Function |
One-touch auto configuration of brightness, contrast, auto focusing |
| Main unit size |
283mm*553mm*505mm |
370mm*656mm*633mm |
| Expanded Functions |
Multiple in-situ function sample stage (force, heat, electricity, etc.) |
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